Scanning photoelectron microscope (SPEM)

Microscope performance

Lateral resolution: below 50nm (depending on the monochromator slits, energy and zone plate diameter and last zone width)


Energetic resolution and relative intensity for different settings:

analyzer pass energy (V) monochromator slit size (µm) total energy resolution (eV) relative intensity to PE=20V slit=30ìm
5 5 0.18 0.04
5 10 0.22 0.07
5 20 0.25 0.15
5 30 0.33 0.2
10 10 0.22 0.16
10 20 0.25 0.35
10 30 0.33 0.47
20 10 0.35 0.35
20 20 0.35 0.75
20 30 0.37 1

Photon flux in the focus: >109ph s-1

Ultima modifica il Venerdì, 20 Gennaio 2012 15:43