Beamline description

Motorized manipulator


The motorized seven-axis manipulator (Huber, Germany) is composed of four linear and three rotational stages used to provide proper orientation of the analyzed sample surface and X-ray monitoring detectors, as required by the experiment to be conducted. In particular, the sample manipulation allows three translations (‘X’, ‘Y’, ‘Z’) in the Cartesian geometry and rotation around two axes (‘Theta’ and ‘Phi’). One additional rotational axis (‘2Theta’) and one linear stage (‘Diode’) are used for the movement/translation of X-ray monitoring detectors with respect to the direction of the SR beam or/and sample surface.
In order to achieve a high-precision positioning for GIXRF and XRR measurements, the two main axes (‘Theta’ and ‘2Theta’) of the two-circle goniometer of the seven-axis manipulator are equipped with absolute encoders (Renishaw, UK). 

 

Layout of the seven-axis manipulator (position: ‘Theta’=0, ‘2Theta’=0 and ‘Phi’=0).
Schematic drawing prepared for the IAEA by Huber Diffraktionstechnik GmbH &Co 





Specifications of the seven (7) axis manipulator

Specification Units ‘’Theta’’ ‘’2Theta’’ ‘’Phi’’ ‘’Diode’’ ‘’Z’’ ‘’X’’ ‘’Y’’
Repeatability [“]1 2.3 7.0 2.5        
Reversal error [“]1 4.2 9.4 3.1        
Optimal backlash distance [°] 0.1 0.1 0.3        
Pitch [“]         32.52 27.53 9.93
Yaw [“]         1.92 14.23 313
Roll [“]         1.82 11.94 31.34
Motor resolution [°] 0.00005 0.00005 0.00025        
mm       0.00025 0.0005 0.00025 0.00025
Motor maximum velocity [°] 0.3 0.3 0.5        
mm       0.5 0.5 0.5 0.5
Motor base velocity  [°] 0.015 0.015 0.025        
mm       0.05 0.05 0.025 0.025
 


1” = 4.85 µrad
2 Measured for 50 mm translation
3 Measured for 110 mm translation
4 Measured for 90 mm translation
 

Base System


The UHV chamber is mounted on a frame that allows its translational and rotational positioning using three (two linear and one rotational) stages, whereas the frame is movable via wheels. It consists of:
  • Support frame that it is a welded steel frame with six adjustable feet and four jacking castors;
  • Lifting stage (base-Y) placed on top of the frame allows motorized positioning of the other two stages and the chamber within +/- 50 mm;
  • Linear horizontal stage (base-X) placed on top of the lifting stage allows movement of the rotational stage including the chamber within +/- 12 mm; the movement is perpendicular to the beam direction;
  • Rotational stage (base-rot) that performs the rotary adjustment of the chamber within a range of +/- 5°.

Specifications of the motor stages for the base system

Degrees of freedom Resolution Reproducibility Adjusting range
base-X < 0.05 mm < 0.1mm +/- 12 mm
base-Y < 0.05 mm < 0.1mm +/- 50 mm
base-rot <0.005° <0.01° +/- 5°

 
Ultima modifica il Lunedì, 08 Gennaio 2024 15:47