DXRL Publications

2022

  1. Deep X-ray lithography on “sol–gel” processed noble metal mesoarchitectured films
    Gayrard Maxime, Marmiroli Benedetta, Chancerel Francois, Decorse Philippe, Amenitsch Heinz, Peron Jennifer, Cattoni Andrea, Faustini Marco
    Nanoscale, Vol. 14 - 5, pp. 1706-1712 (2022)
    doi: 10.1039/d1nr07455e (Journal Article)
  2. Patterning a cellulose based dual-tone photoresist via deep X-ray lithography
    Andreev M., Marmiroli B., Schennach R., Amenitsch H.
    Microelectronic Engineering, Vol. 256, 111720 (2022)
    doi: 10.1016/j.mee.2022.111720 (Journal Article)
  3. X-Ray Lithography for Nanofabrication: Is There a Future?
    Bharti Amardeep, Turchet Alessio, Marmiroli Benedetta
    Frontiers in Nanotechnology, Vol. 4, 835701 (2022)
    doi: 10.3389/fnano.2022.835701 (Journal Article)
Last Updated on Monday, 20 May 2013 14:21