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Using evaporators

Estimated deposition rates

For vapour pressure data of materials and for the selection of suitable crucibles (if applicable) you can consult the following evaporation guides provided by:

At the Materials Science Beamline we obtained the following approximative parameters using e-beam or other evaporators:

Element Form High voltage Emission Rate Date Note
Ag in Mo crucible 1000 V 2 mA 0.6 Å/min Aug 2010  
Al in Al2O3 crucible 0.7 Å/min Sep 2008 Knudsen-cell
Au In C crucible 1000 V 20 mA 0.2 Å/min May 2011  
B     Feb 2015 user's source
Ce in Mo crucible 1000 V 20-26 mA 0.3 Å/min May 2016  
Cl     Jun 2012 user's source
Co rod Ø 2 mm 1000 V 8 mA 0.1 Å/min Sep 2015  
Cu in C crucible 1000 V 30 mA 0.1 Å/min Aug 2011  
Fe wire Ø 2 mm 1000 V 7 mA 0.3 Å/min Aug 2011  
Ga in quartz crucible 0.1 Å/min Aug 2009 Knudsen-cell
In in Mo crucible 400 V 5 mA 0.6 Å/min Jul 2012  
Ir wire Ø 1 mm 1000 V 18 mA 0.02 Å/min Nov 2015  
K alkali metal dispenser 0.7 Å/min Dec 2015 direct current
Mg in crucible 4 Å/min Oct 2009 Knudsen-cell
Mo wire Ø 1 mm 1200 V 30 mA 0.05 Å/min Feb 2007  
Nb rod Ø 2 mm 1000 V 55 mA 0.7 Å/min Mar 2007  
Ni wire Ø 1 mm 1000 V 4 mA 0.2 Å/min Oct 2014  
Pb in C crucible 400 V 5 mA 0.6 Å/min Aug 2011  
Pd wire Ø 1 mm 1000 V 3 mA 0.1 Å/min Nov 2014  
Pt wire Ø 0.5 mm 1000 V 5 mA 0.08 Å/min May 2015  
Rh wire Ø 0.5 mm 1000 V 11 mA 1 Å/min Mar 2014  
Si 1×2 mm2 wafer strip 1000 V 7 mA 0.5 Å/min Jul 2011 or direct current
Sn in Mo or C crucible 1000 V 6 mA 0.4 Å/min May 2015  
Ta wire Ø 0.5 mm 1000 V 55 mA 0.1 Å/min Mar 2009  
Ti wire Ø 1 mm 1200 V 9 mA   Nov 2008 or direct current
V wire Ø 0.5 mm 1400 V 6 mA 0.5 Å/min Sep 2011  
W wire Ø 1 mm 2000 V 30 mA 0.3 Å/min Jan 2010  
Zn     Oct 2009 user's source
Last Updated on Thursday, 12 September 2019 11:12