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Pumping and pressure reading

The pressure in the chambers should not exceed these values during the following operations:

Operation Experimental chamber Preparation chamber - bottom Preparation chamber - top Load lock
sample transfer 2×10-8 mbar 5×10-7 mbar 5×10-7 mbar 1×10-6 mbar
ion sputtering 2×10-6 mbar 2×10-6 mbar
gas exposure 1×10-6 mbar 1×10-6 mbar 10 mbar
measurements 5×10-9 mbar


Experimental chamber

Turbomolecular pump

controlled by TCP380 in next to the chamber.

on/off for turbopump (the membrane pump has independent switch)
standby (slow speed)
heating on/off
(complete manual)

Only manual venting.
Venting with nitrogen gas through the preparation chamber - bottom.
Water- and air-cooled. Water cooling is necessary for bake-out.

Membrane pump

Has independent switch.
There is a valve on the line towards the turbopump.

Titanium sublimation pump

controlled by the bottom AML TSP2 controller In the left experimental rack.

off/continuous/degas/timed
(complete manual)

Cryopump

Under the preparation chamber-bottom, around the titanium sublimation pump.
Helps removing water vapours from the residual gas.
For refilling with LN2 connect a hose with funnel (inlet) and another hose (outlet)
Refill approx. every 30 minutes.
After use blow out LN2 and humidity using compressed air for several hours. During thawing there will be high peaks on the pressure in the chamber (10-6 mbar) so do not do it during measurements!
You might run some titanium sublimation pump cycles in order to help the pressure to recover.

Ionization gauge

controlled by MultiGauge controller in the left experimental rack.

on/off
change units: mbar, torr, Pa

The filament can burn at pressures above 10-4 mbar! Never switch on until the turbopump is at full speed and the cold-cathode gauge shows low pressure.
(complete manual)

Cold-cathode gauge

controlled by MaxiGauge controller in the left beamline rack, sensor 6.

Sensor choose sensor
Sen-on/Sen-off switch sensor on/off
(complete manual)

The pressure can be read in Beamline Control System (BCS) and monitored by Pressure Watcher.


Preparation chamber - bottom

Turbopumping stage

containing membrane pump and turbopump.

Pump controller DCU under the platform.
   on/off for both pumps
  or browse parameters
  together with edit parameter and confirm
  Parameters:
  001: heating on/off
  002: standby (slow speed) on/off
  309: actual rotation speed
  (complete manual)

Automatic venting when at ½ of nominal speed.
For venting connect nitrogen gas line to the venting valve.
Water-cooled. Water cooling is necessary for bake-out.

Titanium sublimation pump

controlled by the top AML TSP2 controller In the left experimental rack.

off/continuous/degas/timed
(complete manual)

Cold-cathode gauge

connected to the DualGauge controller (channel 2, lower number) in the left experimental rack.
   switch channels
  long press for switch on
  long press for switch off
  (complete manual)








Preparation chamber - top

No dedicated pump

This chamber is pumped through preparation chamber - bottom (CF100 gate valve) or load lock (CF38 angle valve).

Full-range gauge

connected to the DualGauge controller (channel 1, upper number) in the left experimental rack.
   switch channels
  long press for switch on
  long press for switch off
  (complete manual)








Load lock

Turbopumping stage

containing membrane pump and turbopump.

Pump controller DCU under the platform.
   on/off for both pumps
  or browse parameters
  together with edit parameter and confirm
  Parameters:
  001: heating on/off
  002: standby (slow speed) on/off
  309: actual rotation speed
  (complete manual DCU, errors)

Automatic venting when at ½ of nominal speed.
For venting connect nitrogen gas line to the venting valve.
Water- and air-cooled. Water cooling is necessary for bake-out.

Full-range gauge

connected to the SingleGauge controller in the left experimental rack.
  no control needed
  (complete manual)












Last Updated on Friday, 13 April 2018 11:01