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Pumping and pressure reading

The pressure in the chambers should not exceed these values during the following operations:

Operation Analysis chamber Preparation chamber - bottom Preparation chamber - top Load lock Electrochemical cell
sample transfer 2×10-8 mbar 5×10-7 mbar 5×10-7 mbar 1×10-6 mbar 1×10-5 mbar
ion sputtering 2×10-6 mbar 2×10-6 mbar
gas exposure 1×10-6 mbar 1×10-6 mbar 10 mbar 1 bar
measurements 5×10-9 mbar


Simplified pumping and pressure measuring scheme (click for full version):


Analysis chamber

Turbomolecular pump

controlled by DCU in the right experimental rack
   on/off
  or browse parameters
  together with edit parameter and confirm
  Parameters:
  001: heating on/off
  002: standby (slow speed) on/off
  309: actual rotation speed
  (manuals pump controller )
Automatic venting when at ½ of nominal speed.
For venting connect nitrogen gas line to the venting valve.
Water- and air-cooled. Water cooling is necessary for bake-out.


Scroll pump

has no switch. Disconnect/connect the mains cable (orange).
For short periods you can just close the valve on the line below the turbopump and leave the scroll pump on.
(manual )



Titanium sublimation pump

controlled by the bottom AML TSP2 controller In the left experimental rack.

off/continuous/degas/timed
(manuals pump controller )


Cryopump

under the X-ray source, around the titanium sublimation pump
Helps removing water vapours from the residual gas.
For refilling with LN2 connect a hose with funnel (inlet) and another hose (outlet)
Refill approx. every 30 minutes.
After use blow out LN2 and humidity using compressed air for several hours. During thawing there will be high peaks on the pressure in the chamber (10-6 mbar) so do not do it during measurements!
You might run some titanium sublimation pump cycles in order to help the pressure recover.


Rotary vane pump

for pumping of the Θ rotary feedthroughs of the manipulators
It must be vented after switching off!
For short periods you can just close the valve on the line and leave the pump on.
(manual )

Ionization gauge

controlled by MultiGauge controller in the left experimental rack.

on/off
change units: mbar, torr, Pa
The filament can burn at pressures above 10-4 mbar! Never switch on until the turbopump is at full speed and the cold-cathode gauge shows low pressure.
(manuals sensor controller )


Cold cathode gauge 1

controlled by MaxiGauge controller in the left experimental rack, channel 1
   switch channels
  long press for switch on
  long press for switch off
 
(manuals sensor controller )




Cold cathode gauge 2

controlled by MaxiGauge controller in the left beamline rack, sensor 6.

Sensor choose sensor
Sen-on/Sen-off switch sensor on/off
(manuals sensor controller )
This pressure can be read in Beamline Control System (BCS) and monitored by Pressure Watcher.


Pirani gauge

below the turbopump
Measuring the pressure in the roughing line (scroll pump)







  (manual )



Preparation chamber - bottom

Turbopumping station

containing membrane pump and turbopump.
Controlled by DCU in the right experimental rack.
   on/off
  or browse parameters
  together with edit parameter and confirm
  Parameters:
  001: heating on/off
  002: standby (slow speed) on/off
  309: actual rotation speed
  (manuals station turbo membrane controller )
Automatic venting when at ½ of nominal speed.
For venting connect nitrogen gas line to the venting valve.
Water-cooled. Water cooling is necessary for bake-out.


Titanium sublimation pump

controlled by the top AML TSP2 controller In the left experimental rack.

off/continuous/degas/timed
(manuals pump controller )


Cryopump


Helps removing water vapours from the residual gas.
Refill with LN2 approx. every 60 minutes.
After use blow out LN2 and humidity using compressed air for several hours. During thawing there will be high peaks on the pressure in the chamber (10-6 mbar).

Cold cathode gauge

controlled by MaxiGauge controller in the left experimental rack, channel 3
   switch channels
  long press for switch on
  long press for switch off
 
(manuals sensor controller )






Preparation chamber - top

No turbomolecular pump

This chamber is pumped through preparation chamber - bottom (CF100 gate valve) or load lock (CF38 angle valve).


Cryopump


Helps removing water vapours from the residual gas.
Refill with LN2 approx. every 60 minutes.
After use blow out LN2 and humidity using compressed air for several hours. During thawing there will be high peaks on the pressure in the chamber (10-6 mbar).


Rotary vane pump

for pumping of the Θ rotary feedthroughs of the manipulators
It must be vented after switching off!
For short periods you can just close the valve on the line and leave the pump on.
(manual )

Full range gauge

controlled by MaxiGauge controller in the left experimental rack, channel 2
   switch channels
  long press for switch on
  long press for switch off
 
(manuals sensor controller )






Load lock

Turbopumping station

containing membrane pump and turbopump.
Controlled by DCU in the right experimental rack.
   on/off
  or browse parameters
  together with edit parameter and confirm
  Parameters:
  001: heating on/off
  002: standby (slow speed) on/off
  309: actual rotation speed
  (manuals station turbo membrane controller )
Automatic venting when at ½ of nominal speed.
For venting connect nitrogen gas line to the venting valve.
Water- and air-cooled. Water cooling is necessary for bake-out.

Full range gauge

controlled by MaxiGauge controller in the left experimental rack, channel 4
   switch channels
  long press for switch on
  long press for switch off
 
(manuals sensor controller )






Electrochemical cell (UHV part)

Turbomolecular pump

controlled by DCU in the right experimental rack
   on/off
  or browse parameters
  together with edit parameter and confirm
  Parameters:
  002: standby (slow speed) on/off
  309: actual rotation speed

  (manuals pump controller )
Automatic venting when at ½ of nominal speed.
For venting connect nitrogen gas line to the venting valve.
Air-cooled. Since water cooling  would be necessary for bakeout, be careful not to warm the pump too much.


Scroll pump

below the platform

For short periods you can just close the valve on the line below the turbopump and leave the scroll pump on.
(manual )

 

Full range gauge

for UHV or air/nitrogen pressure measurements
Controlled by MaxiGauge controller in the left experimental rack, channel 5.
   switch channels
  long press for switch on
  long press for switch off
 
(manuals sensor controller )




Capacitance gauge

for argon pressure measurement
Displayed by MaxiGauge controller in the left beamline rack, channel 6. Always on.
   switch channels
  


(manuals sensor controller )







Last Updated on Tuesday, 13 August 2019 12:40