Publications

2011

1. Boehmite filled hybrid sol-gel system as directly writable hard etching mask for pattern transfer
   Grenci G., Della Giustina G., Pozzato A., Brusatin G., Tormen M.
   Microelectronic Engineering, Vol. 88 - 8, pp. 1964-1967 (2011)
   doi: 10.1016/j.mee.2011.01.012 (Journal Article)
2. Evaluation of a novolak based positive tone photoresist as NanoImprint Lithography resist
   Pozzato A., Grenci G., Birarda G.
   Microelectronic Engineering, Vol. 88 - 8, pp. 2096-2099 (2011)
   doi: 10.1016/j.mee.2011.01.018 (Journal Article)
3. Nanofabrication of hard X-ray optics by metal electroplating in a dry etched mechanically stable inorganic template
   Grenci G., Pozzato A., Carpentiero A., Sovernigo E., Tormen M.
   Microelectronic Engineering, Vol. 88 - 8, pp. 2552-2555 (2011)
   doi: 10.1016/j.mee.2011.02.007 (Journal Article)