EUV MLs for the FERMI@Elettra FEL beam transport system
A periodic Pd/B4C multilayer coating, capped with an aperiodic capping layer structure, optimized for high reflectance at the 3rd harmonic at λ=6.67 nm and good rejection of the fundamental, has been designed, fabricated and tested for the FERMI@Elettra FEL beam transport optics. Reflectance measurements have been done and repeated after one year at the BEAR beamline, and...A.J. Corso et al., Optics Express, 20, 7 (2012).
|
The FERMI@Elettra free electron laser beam transport optics requirements implies to develope new kinds of multilayer interferential coatings. A periodic Pd/B4C multilayer coating, capped with an aperiodic capping layer structure, optimized for high reflectance at the 3rd harmonic at lambda=6.67 nm and good rejection of the fundamental, has been designed, fabricated and tested. Reflectance measurements have been done and repeated after one year at the BEAR beamline, and revealed no measurable performance changes, suggesting good temporal stability. |
Retrieve article
Extreme ultraviolet multilayer for the FERMI@Elettra free electron laser beam transport system, A.J. Corso et al., Optics Express, 20, 7 (2012) |
