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Pumping and pressure reading
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The pressure in the chambers should not exceed these values during the following operations:
|
Operation |
Analysis chamber |
Preparation chamber - bottom |
Preparation chamber - top |
Load lock |
Electrochemical cell |
|
sample transfer |
2×10-8 mbar |
5×10-7 mbar |
5×10-7 mbar |
1×10-6 mbar |
1×10-5 mbar |
|
ion sputtering |
2×10-6 mbar |
2×10-6 mbar |
– |
– |
– |
|
gas exposure |
1×10-6 mbar |
1×10-6 mbar |
10 mbar |
– |
1 bar |
|
measurements |
5×10-9 mbar |
– |
– |
– |
– |
Simplified pumping and pressure measuring scheme (
click for full version):
Last Updated on Thursday, 19 October 2023 10:08
