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Pumping and pressure reading

The pressure in the chambers should not exceed these values during the following operations:

Operation Analysis chamber Preparation chamber - bottom Preparation chamber - top Load lock Electrochemical cell
sample transfer 2×10-8 mbar 5×10-7 mbar 5×10-7 mbar 1×10-6 mbar 1×10-5 mbar
ion sputtering 2×10-6 mbar 2×10-6 mbar
gas exposure 1×10-6 mbar 1×10-6 mbar 10 mbar 1 bar
measurements 5×10-9 mbar

Simplified pumping and pressure measuring scheme (click for full version):

Last Updated on Friday, 12 March 2021 10:11