Beamline overview

End station

The end station consists of 5 vacuum chambers separated by gate valves:

	Analysis chamber	Preparation chamber - bottom	Preparation chamber - top	Load lock	Electrochemical cell (UHV part)
shape	cylindrical dome, Ø 400 mm	spherical, Ø 300 mm	cylindrical, Ø 200 mm	cylindrical, Ø 100 mm	cylindrical, Ø 50 mm
material	μ-metal	stainless steel	stainless steel	stainless steel	stainless steel
pumps	turbo + scroll titanium sublimation cryopump more details	turbo + membrane titanium sublimation cryopump more details	through preparation chamber - bottom or through load lock cryopump more details	turbo + membrane more details	turbo + scroll more details
base pressure	1×10-10 mbar	5×10-10 mbar	5×10-10 mbar	5×10-9 mbar	2×10-8 mbar
working pressure	≤2×10-6 mbar	≤5×10-6 mbar	≤10 mbar	≤5×10-6 mbar	≤1 bar
bake-out time	48 hours	12 hours	12 hours	12 hours	24 hours
equipment	4-axes manipulator ionization gauge 2 cold cathode gauges sputter ion gun LEED optics electron analyzer Mg/Al X-ray source quadruple e-beam evaporator up to 4 e-beam evaporators 3 leak valves quadrupole mass spectrometer pyrometers ports for user equipment possibly gas cell and photodiode	5-axes manipulator cold-cathode gauge sputter ion gun quartz crystal microbalance 2 Knudsen-cell evaporators ports for user equipment	5-axes manipulator full range gauge 2 leak valves ports for user equipment	transfer rod full range gauge glove bag	3-axes manipulator full range gauge capacitance gauge transfer rod Ar inlet and outlet electrochemical cell

Vacuum scheme

(hover over each component to show details; click on the component to jump into the corresponding list below)

Equipment

group	name	description	manuals in PDF	links
analyzer	hemispherical electron analyzer	Specs Phoibos 150 with 1D-DLD detector	analyzer, detector. controller	how to use
beamline	beamline	Bestec (monochromator), Delong Instruments (all other)	monochromator	how to use
chambers	analysis chamber	Lesker, custom made (cylindrical dome, Ø 400 mm, μ-metal)	3D model
	electrochemical cell (UHV part)	Vakuum Praha, custom made (cylindrical, Ø 50 mm, stainless steel)	3D model
	electrochemical cell (quartz)	FAU, custom made (quartz)
	load lock	Vakuum Praha, custom made (cylindrical, Ø 100 mm, stainless steel)	3D model
	preparation chamber - bottom	Vakuum Praha, custom made (spherical, Ø 300 mm, stainless steel)	3D model
	preparation chamber - top	Vakuum Praha, custom made (cylindrical, Ø 200 mm, stainless steel)	3D model
evaporators	e-beam quadruple evaporator	Oxford OS-Vap-4p; with 1 retractable and 3 fixed pockets	evaporator, controller	how to use
	e-beam single evaporators	Tectra e-beam; 2 with retractable and 1 with fixed pocket	evaporator, controller	how to use
	Knudsen cell evaporators	custom made		how to use
gas cell	gas cell	custom made, currently not installed	wiring diagram
gases	40l gas cylinder	SIAD
	minican cylinders	Air Liquide or Linde or SIAD		how to use
gauges	cold cathode gauges	Pfeiffer IKR270 with TPG256A or TPG366 controller	sensor, controller1, controller2	how to use
	capacitance gauge	Pfeiffer PCR280 with TPG366 controller	sensor, controller	how to use
	full range gauges	Pfeiffer PKR261 with TPG366 controller	sensor, controller	how to use
	full range gauge	Pfeiffer PKR361 with TPG251 controller	sensor, controller
	ionization gauge	Varian UHV-24 with Prevac MG15 controller	sensor, controller	how to use
	Pirani gauge	Pfeiffer TPG201	sensor
	Pirani gauge	Pfeiffer TPR281	sensor
ion guns	sputter ion guns	Varian 981-2043 with 981-2046 controller	gun, controller	how to use
LEED	LEED	OCI BDL800IR-LMX-ISH	LEED	how to use
manipulators	3-axes manipulator	Pfeiffer 420MXY040-12 for x and y, MDC RPLM-275-6 for z
	4-axes manipulator	AVC, manual x and y, motorized z (300 mm) and polar Θ, 100-1300 K	drawings	how to use
	5-axes manipulator	AVC, manual x and y, motorized z (500 mm) polar Θ and azimuth Φ, 150-1300 K	drawings	how to use
photodiode	photodiode	IRD AXUV, currently not installed	parameters	photon flux
pumps	cryopumps	FAU, custom made
	rotary vane pump	Edwards RV3	pump
	titanium sublimation pump	Varian 980-4075	controller	how to use
	titanium sublimation pump with cryopump	Leybold V150 with custom made cryopanel	pump, controller	how to use
	turbomolecular pump	Pfeiffer HiPace 80	pump, driver, controller	how to use
	turbomolecular pump	Pfeiffer HiPace 800 M	pump, driver,  controller	how to use
	turbopumping station	Pfeiffer HiCube 80 Eco (turbo HiPace 80 with membrane MVP015-2)	station, turbo, driver, membrane, controller	how to use
	turbopumping station	Pfeiffer HiCube 300 Classic (turbo HiPace 300 with membrane MVP070-3)	station, turbo, driver, membrane, controller	how to use
	turbopumping stations	Pfeiffer TSU261 (turbo TMU261 with membrane MVP055-3)	station, turbo, membrane, controller	how to use
	scroll pump	Anest Iwata ISP-500C	pump	how to use
	scroll pump	Edwards nXDS10iC	pump	how to use
pyrometers	pyrometers	Micro-Epsilon CTVM-3LSF-C3 and CTVM-3H2SF-C3	pyrometers, software	how to use
QCM	quartz crystal microbalance	Lesker/Inficon FTM-2400	sensor, controller	how to use
QMS	quadrupole mass spectrometer	Pfeiffer Prisma QMS200	QMS, software	how to use
transfer rods	transfer rod	Pfeiffer 420MDM040-0500, 500 mm shift
	transfer rod	Vinci CTLT 63 or CTLT 63 II, 1000 mm shift	transfer rod (FR)	how to use
valves	angle valves	Lesker SA0150MCCF
	angle valves	Thermionics MA-750-H		how to use
	ball valves	Swagelok SS-42GS6MM-1466		how to use
	diaphragm valves	Vacom 15DVM-16KF-VV-A and 15DVM-25KF-VV-A
	gate valves	Hositrad HOGVB-CF35-M
	gate valve	HVA 11110-0203	valve
	gate valve	MDC EGV-4000M
	gate valves	Thermionics PFB-G-1500-H/R with roughing port	valve	how to use
	gate valves	Thermionics PFB-G-2500-H	valve
	gate valve	VAT 01032-CE44	valve	how to use
	leak valves	Duniway VLVE-1000	valve	how to use
	minican valve	Air Liquide 1004527, with manometer		how to use
	minican valve	Allectra, custom made		how to use
	reducing valve	SIAD RSD2S 400/-1+9 AR HE	valve (IT)
wobble stick	wobble stick	MDC SU-275
X-ray source	X-ray source	Specs XR50, dual anode (Mg/Al), non monochromatic	source, controller, chiller, water box	how to use