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Beamline overview

End station

The end station consists of 5 vacuum chambers separated by gate valves:

  Analysis chamber Preparation chamber - bottom Preparation chamber - top Load lock Electrochemical cell
(UHV part)
shape cylindrical dome, Ø 400 mm spherical, Ø 300 mm cylindrical, Ø 200 mm cylindrical, Ø 100 mm cylindrical, Ø 50 mm
material μ-metal stainless steel stainless steel stainless steel stainless steel
pumps turbo + scroll
titanium sublimation
cryopump
more details
turbo + membrane
titanium sublimation
cryopump
more details
through preparation chamber -
bottom or through load lock
cryopump
more details
turbo + membrane


more details
turbo + scroll


more details
base pressure 1×10-10 mbar 5×10-10 mbar 5×10-10 mbar 5×10-9 mbar 2×10-8 mbar
working pressure ≤2×10-6 mbar ≤5×10-6 mbar ≤10 mbar ≤5×10-6 mbar ≤1 bar
bake-out time 48 hours 12 hours 12 hours 12 hours 24 hours
equipment 4-axes manipulator
ionization gauge
2 cold cathode gauges
sputter ion gun
LEED optics
electron analyzer
Mg/Al X-ray source
quadruple e-beam evaporator
up to 4 e-beam evaporators
3 leak valves
quadrupole mass spectrometer
pyrometers
ports for user equipment
possibly gas cell and photodiode
5-axes manipulator
cold-cathode gauge
sputter ion gun
quartz crystal microbalance
2 Knudsen-cell evaporators
ports for user equipment
5-axes manipulator
full range gauge
2 leak valves
ports for user equipment
transfer rod
full range gauge
glove bag
3-axes manipulator
full range gauge
capacitance gauge
transfer rod
Ar inlet and outlet
electrochemical cell

Vacuum scheme

(hover over each component to show details; click on the component to jump into the corresponding list below)


Hemispherical electron analyzer Specs Phoibos 150 with 1D-DLD detector beamline UHV chamber Lesker; custom design UHV chamber Vakuum Praha; custom design UHV chamber Vakuum Praha; custom design UHV chamber Vakuum Praha; custom design UHV chamber Vakuum Praha; custom design Quartz chamber for electrochemistry, FAU, custom made Quadruple e-beam evaporator Oxford OS-Vap-4p Single e-beam evaporator Tectra e-flux Single e-beam evaporator Tectra e-flux Single e-beam evaporator Tectra e-flux Knudsen cell evaporator, custom made Knudsen cell evaporator, custom made Gas cell, custom made, currently not installed Gas cylinder SIAD Minican gas bottle, Linde or SIAD or Air Liquide Minican gas bottle, Linde or SIAD or Air Liquide Minican gas bottle, Linde or SIAD or Air Liquide Minican gas bottle, Linde or SIAD or Air Liquide Minican gas bottle, Linde or SIAD or Air Liquide Minican gas bottle, Linde or SIAD or Air Liquide Minican gas bottle, Linde or SIAD or Air Liquide Cold cathode gauge Pfeiffer IKR261 Cold cathode gauge Pfeiffer IKR270 Cold cathode gauge Pfeiffer IKR270 Cold cathode gauge Pfeiffer IKR270 Capacitance gauge Pfeiffer PCR280 Full range gauge Pfeiffer PKR261 Full range gauge Pfeiffer PKR261 Full range gauge Pfeiffer PKR261 Ionization gauge Varian UHV-24 Pirani gauge Pfeiffer TPG201 Pirani gauge Pfeiffer TPR281 Sputter ion gun Varian 981-2043 Sputter ion gun Varian 981-2043 LEED optics Omicron SpectaLEED 3-axes manipulator Pfeiffer 420MXY040-12 for XY, MDC RPLM-275-6 for Z 4-axes manipulator AVC; custom design 5-axes manipulator AVC; custom design Photodiode IRD AXUV, currently not installed Cryopump FAU, custom made Cryopump FAU, custom made Rotary vane pump Edwards RV3 Titanium sublimation pump Varian 980-4075 Titanium sublimation pump Leybold V150 with cryopump Turbomolecular pump Pfeiffer HiPace 80 Turbomolecular pump Pfeiffer HiPace 800 M Turbopumping station Pfeiffer HiCube 80 Eco (turbopump HiPace 80) Turbopumping station Pfeiffer HiCube 80 Eco (membrane pump MVP015-2) Turbopumping station Pfeiffer HiCube 300 Classic (turbopump HiPace 300) Turbopumping station Pfeiffer HiCube 300 Classic (membrane pump MVP070-3) Turbopumping station Pfeiffer TSU261 (turbopump TMU261) Turbopumping station Pfeiffer TSU261 (membrane pump MVP055-3) Turbopumping station Pfeiffer TSU261 (turbopump TMU261) Turbopumping station Pfeiffer TSU261 (membrane pump MVP055-3) Scroll pump Anest Iwata ISP-500C Scroll pump Edwards nXDS10i Quartz crystal microbalance Lesker/Inficon FTM-2400 Quadrupole mass spectrometer Pfeiffer QMS200 Transfer rod Pfeiffer 420MDM040-0500, 500 mm shift Transfer rod Vinci CTLT 63 or CTLT 63 II, 1000 mm shift Angle valve Lesker SA0150MCCF Angle valve Lesker SA0150MCCF Angle valve Thermionics MA-750-H Angle valve Thermionics MA-750-H Ball valve Swagelok SS-42GS6MM-1466 Ball valve Swagelok SS-42GS6MM-1466 Ball valve Swagelok SS-42GS6MM-1466 Ball valve Swagelok SS-42GS6MM-1466 Ball valve Swagelok SS-42GS6MM-1466 Ball valve Swagelok SS-42GS6MM-1466 Ball valve Swagelok SS-42GS6MM-1466 Diaphragm valve Vacom 15DVM-16KF-VV-A Diaphragm valve Vacom 15DVM-16KF-VV-A Diaphragm valve Vacom 15DVM-25KF-VV-A Gate valve Hositrad HOGVB-CF35-M Gate valve Hositrad HOGVB-CF35-M Gate valve HVA 11110-0203 Gate valve MDC EGV-4000M Gate valve Thermionics PFB-G-1500-H/R with roughing port Gate valve Thermionics PFB-G-1500-H/R with roughing port Gate valve Thermionics PFB-G-2500-H Gate valve Thermionics PFB-G-2500-H Gate valve VAT 01032-CE44 (electropneumatic) Leak valve Duniway VLVE-1000 Leak valve Duniway VLVE-1000 Leak valve Duniway VLVE-1000 Leak valve Duniway VLVE-1000 Leak valve Duniway VLVE-1000 Leak valve Duniway VLVE-1000 Leak valve Duniway VLVE-1000 Minican valve with manometer Air Liquide 1004527 Minican valve with manometer Air Liquide 1004527 Minican valve with manometer Air Liquide 1004527 Minican valve with manometer Air Liquide 1004527 Minican valve with manometer Air Liquide 1004527 Minican valve Allectra, custom made Minican valve Allectra, custom made Reducing valve SIAD RSD2S 400/-1+9 AR HE X-ray source Specs XR50

Equipment


group name description manuals in PDF pdf links
analyzer hemispherical electron analyzer Specs Phoibos 150 with 1D-DLD detector analyzer, detector. controller how to use
beamline beamline   monochromator how to use
chambers analysis chamber Lesker, custom made (cylindrical dome, Ø 400 mm, μ-metal) 3D model  
  electrochemical cell (UHV part) Vakuum Praha, custom made (cylindrical, Ø 50 mm, stainless steel) 3D model  
  electrochemical cell (quartz) FAU, custom made (quartz)    
  load lock Vakuum Praha, custom made (cylindrical, Ø 100 mm, stainless steel) 3D model  
  preparation chamber - bottom Vakuum Praha, custom made (spherical, Ø 300 mm, stainless steel) 3D model  
  preparation chamber - top Vakuum Praha, custom made (cylindrical, Ø 200 mm, stainless steel) 3D model  
evaporators e-beam quadruple evaporator Oxford OS-Vap-4p; with 1 retractable and 3 fixed pockets evaporator, controller how to use
  e-beam single evaporators Tectra e-beam; 2 with retractable and 1 with fixed pocket evaporator, controller how to use
  Knudsen cell evaporators custom made   how to use
gas cell gas cell custom made, currently not installed wiring diagram  
gases 40l gas cylinder SIAD    
  minican cylinders Air Liquide or Linde or SIAD   how to use
gauges cold cathode gauge Pfeiffer IKR261 with TPG251 controller sensor, controller  
  cold cathode gauges Pfeiffer IKR270 with TPG256A or TPG366 controller sensor, controller1,
controller2
how to use
  capacitance gauge Pfeiffer PCR280 with TPG366 controller sensor, controller how to use
  full range gauges Pfeiffer PKR261 with TPG366 controller sensor, controller how to use
  ionization gauge Varian UHV-24 with MultiGauge controller sensor, controller how to use
  Pirani gauge Pfeiffer TPG201 sensor  
  Pirani gauge Pfeiffer TPR281 sensor  
ion guns sputter ion guns Varian 981-2043 with 981-2046 controller gun, controller how to use
LEED LEED Omicron SpectaLEED with NGL10 controller optics, controller how to use
manipulators 3-axes manipulator Pfeiffer 420MXY040-12 for x and y, MDC RPLM-275-6 for z    
  4-axes manipulator AVC, manual x and y, motorized z (300 mm) and polar Θ, 100-1300 K drawings how to use
  5-axes manipulator AVC, manual x and y, motorized z (500 mm) polar Θ and azimuth Φ,
150-1300 K
drawings how to use
photodiode photodiode IRD AXUV, currently not installed parameters photon flux
pumps cryopumps FAU, custom made    
  rotary vane pump Edwards RV3 pump  
  titanium sublimation pump Varian 980-4075 controller how to use
  titanium sublimation pump
with cryopump
Leybold V150 with custom made cryopanel pump, controller how to use
  turbomolecular pump Pfeiffer HiPace 80 pump, controller how to use
  turbomolecular pump Pfeiffer HiPace 800 M pump, controller how to use
  turbopumping station Pfeiffer HiCube 80 Eco (turbo HiPace 80 with membrane MVP015-2) station, turbo,
membrane, controller
how to use
  turbopumping station Pfeiffer HiCube 300 Classic (turbo HiPace 300 with membrane MVP070-3) station, turbo,
membrane, controller
how to use
  turbopumping stations Pfeiffer TSU261 (turbo TMU261 with membrane MVP055-3) station, turbo,
membrane, controller
how to use
  scroll pump Anest Iwata ISP-500C pump how to use
  scroll pump Edwards nXDS10i pump how to use
pyrometers pyrometers Micro-Epsilon CTLM-3H1CF4-C3 and CTLM-2HCF4-C3 pyrometer how to use
QCM quartz crystal microbalance Lesker/Inficon FTM-2400 sensor, controller how to use
QMS quadrupole mass spectrometer Pfeiffer Prisma QMS200 QMS, software how to use
transfer rods transfer rod Pfeiffer 420MDM040-0500, 500 mm shift    
  transfer rod Vinci CTLT 63 or CTLT 63 II, 1000 mm shift transfer rod (FR) how to use
valves angle valves Lesker SA0150MCCF    
  angle valves Thermionics MA-750-H   how to use
  ball valves Swagelok SS-42GS6MM-1466   how to use
  diaphragm valves Vacom 15DVM-16KF-VV-A and 15DVM-25KF-VV-A    
  gate valves Hositrad HOGVB-CF35-M    
  gate valve HVA 11110-0203 valve  
  gate valve MDC EGV-4000M    
  gate valves Thermionics PFB-G-1500-H/R with roughing port valve how to use
  gate valves Thermionics PFB-G-2500-H valve  
  gate valve VAT 01032-CE44 valve how to use
  leak valves Duniway VLVE-1000 valve how to use
  minican valve Air Liquide 1004527, with manometer   how to use
  minican valve Allectra, custom made   how to use
  reducing valve SIAD RSD2S 400/-1+9 AR HE valve (IT)  
wobble stick wobble stick MDC SU-275    
X-ray source X-ray source Specs XR50, dual anode (Mg/Al), non monochromatic source, controller,
chiller, water box
how to use

Last Updated on Thursday, 22 August 2019 17:45