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Pumping and pressure reading

Preparation chamber - top

No turbomolecular pump

This chamber is pumped through preparation chamber - bottom (CF100 gate valve) or load lock (CF38 angle valve).


Helps removing water vapours from the residual gas.
Refill with LN2 approx. every 60 minutes.
After use blow out LN2 and humidity using compressed air for several hours. During thawing there will be high peaks on the pressure in the chamber (10-6 mbar).

Rotary vane pump

for pumping of the Θ rotary feedthroughs of the manipulators
It must be vented after switching off!
For short periods you can just close the valve on the line and leave the pump on.
(manual )

Full range gauge

controlled by MaxiGauge controller in the left experimental rack, channel 2
   switch channels
  long press for switch on
  long press for switch off
(manuals sensor controller )

Last Updated on Friday, 12 March 2021 10:11