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Pumping and pressure reading

Load lock

Turbopumping station

containing membrane pump and turbopump.
Controlled by DCU in the right experimental rack.
  or browse parameters
  together with edit parameter and confirm
  001: heating on/off
  002: standby (slow speed) on/off
  309: actual rotation speed
  (manuals station turbo membrane controller )
Automatic venting when at ½ of nominal speed.
For venting connect nitrogen gas line to the venting valve.
Water- and air-cooled. Water cooling is necessary for bake-out.

Full range gauge

controlled by MaxiGauge controller in the left experimental rack, channel 4
   switch channels
  long press for switch on
  long press for switch off
(manuals sensor controller )

Last Updated on Friday, 12 March 2021 10:11