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Pumping and pressure reading

Preparation chamber - bottom

Turbopumping station

containing membrane pump and turbopump.
Controlled by DCU in the right experimental rack.
  or browse parameters
  together with edit parameter and confirm
  001: heating on/off
  002: standby (slow speed) on/off
  309: actual rotation speed
  (manuals station turbo membrane controller )
Automatic venting when at ½ of nominal speed.
For venting connect nitrogen gas line to the venting valve.
Water-cooled. Water cooling is necessary for bake-out.

Titanium sublimation pump

controlled by the top AML TSP2 controller In the left experimental rack.

(manuals pump controller )


Helps removing water vapours from the residual gas.
Refill with LN2 approx. every 60 minutes.
After use blow out LN2 and humidity using compressed air for several hours. During thawing there will be high peaks on the pressure in the chamber (10-6 mbar).

Cold cathode gauge

controlled by MaxiGauge controller in the left experimental rack, channel 3
   switch channels
  long press for switch on
  long press for switch off
(manuals sensor controller )

Last Updated on Friday, 12 March 2021 10:11