Pumping and pressure reading

Pagina 3 di 6

Preparation chamber - bottom

Turbopumping station

containing membrane pump and turbopump.
Controlled by DCU in the right experimental rack.
DCU  on/off on/off
  left or right browse parameters
  left together with right edit parameter and confirm
  Parameters:
  001: heating on/off
  002: standby (slow speed) on/off
  309: actual rotation speed
  (manuals station turbo membrane controller PDF)
Automatic venting when at ½ of nominal speed.
For venting connect nitrogen gas line to the venting valve.
Water-cooled. Water cooling is necessary for bake-out.


Titanium sublimation pump

controlled by the top AML TSP2 controller In the left experimental rack.
TSP controller
knob off/continuous/degas/timed
(manuals pump controller PDF)


Cryopump

cryopump
Helps removing water vapours from the residual gas.
Refill with LN2 approx. every 60 minutes.
After use blow out LN2 and humidity using compressed air for several hours. During thawing there will be high peaks on the pressure in the chamber (10-6 mbar).

Cold cathode gauge

controlled by MaxiGauge controller in the left experimental rack, channel 3
  TPG366 channel switch channels
  up long press for switch on
  down long press for switch off
 
(manuals sensor controller PDF)





Ultima modifica il Giovedì, 19 Ottobre 2023 10:08