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Sample scanning stage

The sample movements and scanning imaging are performed using a double motor stage. The coarse stage is used for the 'long' distance movements with ìm large steps, whereas the fine piezomotor stage has small movement window with the steps which can be as small as 1nm (see the Table below). The sample manipulator is directly attached to the fine movement stage which is in its turn attached to the coarse movements stage. Fine stage is used only for movements along the sample surface, i.e. it is 2-directional XY type, whereas the coarse has additional Z direction along the X-Ray beam which is used to put the sample surface in the focal plane.

Scanning stage characteristics:

  maximum image size total range minimum step size
coarse stage >1mm2 30x30x30 mm 1µm
fine stage 100x100µm2 100x100µm2 1nm


Last Updated on Monday, 23 March 2020 16:15