Beamline Description


LILIT beam line was designed in order to allow the selection of a wide spectral range continuously, from soft (1.0 keV) to hard (12 keV) X-Rays. This is achieved by combining high-pass filters (i.e. two Be windows) with low-pass filters (mirrors at controlles angles of incidence). The configurations devoted to deliver a soft X-ray spectrum (photon energy between 1 and 2 keV) are optimized to achieves the highest lithographic resolution. The beamline can provide also spectra in the hard X-ray region (photon energy higher than 10 keV) where sensitive materials of thickness of several tens of microns can be successfully exposed. The exposure consists in a continous scansion of the mask-sample assembly in front of the impinging X-ray beam; this is performed with a Scanner installed in a class 10 clean room, controlled by a remote software. After exposure, the lithographed sample is post-processed (post-exposure bake, if any, development and microscopical inspection) in the class 1000 adhiacent clean room.

The beamline consists of one plane mirror placed at 14m from the source and of a second toroidal mirror placed at 2 m from plane mirror. The total length of the beamline, calculated from the front-end port of the bending magnet, is 13.3 m. The angles under which the synchrotron radiation is collected have been fixed at 6 mrad and 0.83 mrad respectively in the horizontal and the vertical plane. The latter value corresponds to the natural divergence of the synchrotron radiation in the soft X-rays range under the standard operating condition of the beamline. A further selection down stream of the solid angle can be done by using adjustable slits. A second Beryllium window is located before plane mirror. Further adjustable slits for the beam shaping, and a photon shutter are placed after toroidal mirror close to the end of the beamline. 

Last Updated on Wednesday, 21 December 2011 12:45