DXRL Publications

2022

1. Deep X-ray lithography on “sol–gel” processed noble metal mesoarchitectured films
   Gayrard Maxime, Marmiroli Benedetta, Chancerel Francois, Decorse Philippe, Amenitsch Heinz, Peron Jennifer, Cattoni Andrea, Faustini Marco
   Nanoscale, Vol. 14 - 5, pp. 1706-1712 (2022)
   doi: 10.1039/d1nr07455e (Journal Article)
2. Patterning a cellulose based dual-tone photoresist via deep X-ray lithography
   Andreev M., Marmiroli B., Schennach R., Amenitsch H.
   Microelectronic Engineering, Vol. 256, 111720 (2022)
   doi: 10.1016/j.mee.2022.111720 (Journal Article)
3. X-Ray Lithography for Nanofabrication: Is There a Future?
   Bharti Amardeep, Turchet Alessio, Marmiroli Benedetta
   Frontiers in Nanotechnology, Vol. 4, 835701 (2022)
   doi: 10.3389/fnano.2022.835701 (Journal Article)