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DXRL Publications
Page 18 of 18
2005
- Low cost transparent SU-8 membrane mask for deep X-ray lithography
Cabrini S., Pérennès F., Marmiroli B., Olivo A., Carpentiero A., Kumar R., Candeloro P., Fabrizio E.D.
Microsystem Technologies, Vol. 11 - 4-5, pp. 370-373 (2005)
doi: 10.1007/s00542-004-0473-5 (Journal Article)
Last Updated on Monday, 20 May 2013 14:21
