Titanium sublimation pumpThe degas procedure is fully automated by the corresponding controller (degas knob) and consists of slow reaching 25 A filament current and keeping it for 15 min. It is enough to degas one filament. Nevertheless, the pressure significantly rises during every successive sublimation cycle (38.5 A, 1 min) up to 10-8-10-7 mbar. Observe the pressure during first several sublimation cycles after the bake-out and abort the sublimation if the pressure is too high..Estimated time: 30 min. Quadrupole mass spectrometerNo special degas procedure is required. Switch on the filament as described here and keep it on for about 30 min. You can also record the mass spectrum. If there is no leak in the chamber the intensity of mass 14 should be lower than that of mass 15.Estimated time: 30 min Sputter ion gunThe corresponding power supply provides an automated degas procedure activated by the DEGAS knob. It is enough to degas one filament.For details see the corresponding manual. Estimated time: 10 min. LEEDThe filament is degassed by setting WEHNELT to zero and then slowly increasing the FILAMENT current (IFIL) up to 1.25 A and waiting until the emission current IE reaches 0.5 mA.For details see the corresponding manual. Estimated time: 3 hours. Knudsen-cell evaporatorsThe evaporators are degassed on first use by reaching the desired parameters.Estimated time: 30 min. |
X-ray sourceThe power supply provides semi-automated procedures for:
Estimated time: 15 hours. Tectra e-beam evaporators
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Oxford e-beam evaporator
Sample manipulator and sampleThe degas happens at first several cycles of sample annealing.Estimated time: 30 min. Electron analyzer detectorWarning: this is the only degas procedure that must be done after complete cooling down. Wait at least 72 hours after the bake-out finish!The detector is degassed by slowly increasing the voltage from 0 up to ~2000 V with all excitation sources off. It is done by using the detector voltage scan saved in the yymmdd_start-up.xml file in the current dara folder (D:\Data\2020\). For parameters you can use any recent file. For details see the corresponding manual. Estimated time: 30 min. |