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Specifications
Page 2 of 3
SPEM microscope
Lateral resolution: |
best 40 nm |
Energetic resolution: |
see Energetic Resolution Table |
microspot size (FWHM): |
best with currently available ZPs 120 nm |
angle of incidence: |
90° sample-photon beam |
Beamline optics
|
toroidal prefocusing mirror |
Monocromator
|
Spherical Grating Monochromator (plane mirror and spherical grating) |
|
fixed entrance slit (Hor) |
|
fixed exit slit (Hor+Ver) |
|
range: 400-1200 eV |
|
resolving power: see Resolving Power of Monochromator |
|
Energy Resolution
Lateral Resolution
|
Last Updated on Friday, 27 March 2020 10:45