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Specifications

Spatial Resolution

FIB - patterned Au (10 nm) on Si


Energy Resolution


Technigue

Pass Energy
(eV)

Slit width
(mm)

Analyser resolution
(meV)

Hg-Source

50

1

400

micro-XPS/UPS

100

1

395

micro-XPS/UPS

100

0.5

200

micro-XPS/UPS

50 1 195

micro-XPS/UPS

50

0.5

100

micro-XPS/UPS

25

1

100

Last Updated on Monday, 11 November 2019 16:18