Pumping and pressure reading

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Preparation chamber - top

No turbomolecular pump

This chamber is pumped through preparation chamber - bottom (CF100 gate valve) or load lock (CF38 angle valve).


Cryopump

cryopump
Helps removing water vapours from the residual gas.
Refill with LN2 approx. every 60 minutes.
After use blow out LN2 and humidity using compressed air for several hours. During thawing there will be high peaks on the pressure in the chamber (10-6 mbar).


Rotary vane pump

for pumping of the Θ rotary feedthroughs of the manipulators
It must be vented after switching off!
For short periods you can just close the valve on the line and leave the pump on.
(manual PDF)

Full range gauge

controlled by MaxiGauge controller in the left experimental rack, channel 2
  TPG366 channel switch channels
  up long press for switch on
  down long press for switch off
 
(manuals sensor controller PDF)





Last Updated on Thursday, 19 October 2023 10:08