Pumping and pressure reading
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Load lock
Turbopumping stationcontaining membrane pump and turbopump.Controlled by DCU in the right experimental rack. on/off or browse parameters together with edit parameter and confirm Parameters: 001: heating on/off 002: standby (slow speed) on/off 309: actual rotation speed (manuals station turbo membrane controller ) Automatic venting when at ½ of nominal speed. For venting connect nitrogen gas line to the venting valve. Water- and air-cooled. Water cooling is necessary for bake-out. |
Full range gaugecontrolled by MaxiGauge controller in the left experimental rack, channel 4switch channels long press for switch on long press for switch off (manuals sensor controller ) |
Last Updated on Thursday, 19 October 2023 10:08