Pumping and pressure reading

The pressure in the chambers should not exceed these values during the following operations:

Operation	Analysis chamber	Preparation chamber - bottom	Preparation chamber - top	Load lock	Electrochemical cell
sample transfer	2×10-8 mbar	5×10-7 mbar	5×10-7 mbar	1×10-6 mbar	1×10-5 mbar
ion sputtering	2×10-6 mbar	2×10-6 mbar	–	–	–
gas exposure	1×10-6 mbar	1×10-6 mbar	10 mbar	–	1 bar
measurements	5×10-9 mbar	–	–	–	–

Simplified pumping and pressure measuring scheme (click for full version):